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Seebeck Coefficient of PolysiliconDear Colleague, I'm finding the inforamtion related to seebeck coefficient of polysilicon film used in semiconductor process Especially, I'd like to know the change of seebeck coefficient on nondegenerated/degenerated doped polysilicon at temperature from 20 to 80 degC. (on some refernece this is written by "reponsivity of temperature coefficient") Thanks,
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Charles, Probably everything
Charles,
Probably everything you need is in the classic paper:
T. H. Geballe and G. W. Hull, "Seebeck Effect in Silicon," Physical Review, vol. 98, pp. 940-947, 1955.
But you might also look at:
J. P. Dismukes, L. Ekstrom, E. F. Steigmeir, I. Kudman, and D. S. Beers, "Thermal and Electrical Properties of Heavily Doped Ge-Si Alloys up to 1300 K," J. Appl. Phys., vol. 35, pp. 2899-2907, 1964.
The Dismukes paper is on Ge-Si (not pure Si), but the Seebeck of (say) 85% Si-15% Ge is not much different from 100% Si, and the Dismukes study does a better job of the carrier concentration dependence than anything I've seen on pure Si.
As for poly-silicon vs. single crystal, the difference appears to be really small, probably not observable at 300 K (although at low temperatures, where phonon-drag becomes important, the grain-size effect might become quite significant).
Hope that helps.
- Cronin
Hey Cronin! Your
Hey Cronin!
Your encyclopedic knowledge of all things thermoelectric is most impressive!
Can you tell me where I can look up the thermoelectric properties of the inhomogeneous mixtures of dissimilar metals commonly used in restorative dentistry?
Keith P Walsh